Storage elements using nanotube switching elements

ABSTRACT

Data storage circuits and components of such circuits constructed using nanotube switching elements. The storage circuits may be stand-alone devices or cells incorporated into other devices or circuits. The data storage circuits include or can be used in latches, master-slave flip-flops, digital logic circuits, memory devices and other circuits. In one aspect of the invention, a master-slave flip-flop is constructed using one or more nanotube switching element-based storage devices. The master storage element or the slave storage element or both may be constructed using nanotube switching elements, for example, using two nanotube switching element-based inverters. The storage elements may be volatile or non-volatile. An equilibration device is provided for protecting the stored data from fluctuations on the inputs. Input buffers and output buffers for data storage circuits of the invention may also be constructed using nanotube switching elements.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional application of and claims the benefitof U.S. patent application Ser. No. 11/651,263 filed Jan. 9, 2007, nowU.S. Pat. No. ______, entitled Storage Elements Using Nanotube SwitchingElements, the entire contents of which are incorporated herein byreference, which claims the benefit of U.S. patent application Ser. No.11/032,983 filed Jan. 10, 2005, now U.S. Pat. No. 7,161,403, entitledStorage Elements Using Nanotube Switching Elements, the entire contentsof which are incorporated herein by reference, which claims the benefitof U.S. Provisional Patent Application No. 60/581,301 filed Jun. 18,2004, entitled Nonvolatile Carbon Nanotube Logic (NLOGIC) Master-SlaveLatches, the entire contents of which are incorporated herein byreference.

This application is related to the following applications:

-   -   U.S. patent application Ser. No. 10/917,794, filed on Aug. 13,        2004, now U.S. Pat. No. 7,115,960, entitled Nanotube-Based        Switching Elements;    -   U.S. patent application Ser. No. 10/918,085, filed on Aug. 13,        2004, now U.S. Pat. No. 6,990,009, entitled Nanotube-Based        Switching Elements With Multiple Controls;    -   U.S. patent application Ser. No. 10/918,181, filed on Aug. 13,        2004, now U.S. Pat. No. 7,071,023, entitled Nanotube Device        Structure And Methods Of Fabrication;    -   U.S. patent application Ser. No. 10/917,893, filed on Aug. 13,        2004, now U.S. Pat. No. 7,138,832, entitled Nanotube-Based        Switching Elements And Logic Circuits;    -   U.S. patent application Ser. No. 10/917,606, filed on Aug. 13,        2004, entitled Isolation Structure For Deflectable Nanotube        Elements;    -   U.S. patent application Ser. No. 10/917,932, filed on Aug. 13,        2004, entitled Circuits Made From Nanotube-Based Switching        Elements With Multiple Controls;    -   U.S. patent application Ser. No. 11/083,087, filed on Jan. 10,        2005, entitled Nanotube-Based Transfer Devices and Related        Circuits;    -   U.S. patent application Ser. No. 11/033,089, filed on Jan. 10,        2005, now U.S. Pat. No. 7,288,970, entitled Integrated Nanotube        and Field Effect Switching Device;    -   U.S. patent application Ser. No. 11/033,213, filed on Jan. 10,        2005, now U.S. Pat. No. 7,329,931, entitled Receiver Circuit        Using Nanotube-Based Switches and Transistors;    -   U.S. patent application Ser. No. 11/033,215, filed on Jan. 10,        2005, now U.S. Pat. No. 7,330,709, entitled Receiver Circuit        Using Nanotube-based Switches and Logic;    -   U.S. patent application Ser. No. 11/033,216, filed on Jan. 10,        2005, now U.S. Pat. No. 7,164,744, entitled Nanotube-based Logic        Driver Circuits; and    -   U.S. patent application Ser. No. 11/032,823, filed on Jan. 10,        2005, now U.S. Pat. No. 7,167,026, entitled Tri-State Circuit        Using Nanotube Switching Elements.

FIELD OF THE INVENTION

This invention relates generally to storage elements and devices fordigital logic circuits and more particularly to storage elements thatincorporate nanotube switching elements.

DISCUSSION OF RELATED ART

Digital logic circuits are used in personal computers, portableelectronic devices such as personal organizers and calculators,electronic entertainment devices, and in control circuits forappliances, telephone switching systems, automobiles, aircraft and otheritems of manufacture. Early digital logic was constructed out ofdiscrete switching elements composed of individual bipolar transistors.With the invention of the bipolar integrated circuit, large numbers ofindividual switching elements could be combined on a single siliconsubstrate to create complete digital logic circuits such as inverters,NAND gates, NOR gates, flip-flops, adders, etc. However, the density ofbipolar digital integrated circuits is limited by their high powerconsumption and the ability of packaging technology to dissipate theheat produced while the circuits are operating. The availability ofmetal oxide semiconductor (“MOS”) integrated circuits using field effecttransistor (“FET”) switching elements significantly reduces the powerconsumption of digital logic and enables the construction of the highdensity, complex digital circuits used in current technology. Thedensity and operating speed of MOS digital circuits are still limited bythe need to dissipate the heat produced when the device is operating.

Digital logic integrated circuits constructed from bipolar or MOSdevices do not function correctly under conditions of high heat orextreme environments. Current digital integrated circuits are normallydesigned to operate at temperatures less than 100 degrees centigrade andfew operate at temperatures over 200 degrees centigrade. In conventionalintegrated circuits, the leakage current of the individual switchingelements in the “off” state increases rapidly with temperature. Asleakage current increases, the operating temperature of the devicerises, the power consumed by the circuit increases, and the difficultyof discriminating the off state from the on state reduces circuitreliability. Conventional digital logic circuits also short internallywhen subjected to certain extreme environments because electricalcurrents are generated inside the semiconductor material. It is possibleto manufacture integrated circuits with special devices and isolationtechniques so that they remain operational when exposed to suchenvironments, but the high cost of these devices limits theiravailability and practicality. In addition, such digital circuitsexhibit timing differences from their normal counterparts, requiringadditional design verification to add protection to an existing design.

Integrated circuits constructed from either bipolar or FET switchingelements are volatile. They only maintain their internal logical statewhile power is applied to the device. When power is removed, theinternal state is lost unless some type of non-volatile memory circuit,such as EEPROM (electrically erasable programmable read-only memory), isadded internal or external to the device to maintain the logical state.Even if non-volatile memory is utilized to maintain the logical state,additional circuitry is necessary to transfer the digital logic state tothe memory before power is lost, and to restore the state of theindividual logic circuits when power is restored to the device.Alternative solutions to avoid losing information in volatile digitalcircuits, such as battery backup, also add cost and complexity todigital designs.

Important characteristics for logic circuits in an electronic device arelow cost, high density, low power, and high speed. Conventional logicsolutions are limited to silicon substrates, but logic circuits built onother substrates would allow logic devices to be integrated directlyinto many manufactured products in a single step, further reducing cost.

Devices have been proposed which use nanoscopic wires, such assingle-walled carbon nanotubes, to form crossbar junctions to serve asmemory cells. (See WO 01/03208, Nanoscopic Wire-Based Devices, Arrays,and Methods of Their Manufacture; and Thomas Rueckes et al., “CarbonNanotube-Based Nonvolatile Random Access Memory for MolecularComputing,” Science, vol. 289, pp. 94-97, 7 Jul., 2000.) Hereinafterthese devices are called nanotube wire crossbar memories (NTWCMs). Underthese proposals, individual single-walled nanotube wires suspended overother wires define memory cells. Electrical signals are written to oneor both wires to cause them to physically attract or repel relative toone another. Each physical state (i.e., attracted or repelled wires)corresponds to an electrical state. Repelled wires are an open circuitjunction. Attracted wires are a closed state forming a rectifiedjunction. When electrical power is removed from the junction, the wiresretain their physical (and thus electrical) state thereby forming anon-volatile memory cell.

U.S. Patent Publication No. 2003-0021966 discloses, among other things,electromechanical circuits, such as memory cells, in which circuitsinclude a structure having electrically conductive traces and supportsextending from a surface of a substrate. Nanotube ribbons that canelectromechanically deform, or switch are suspended by the supports thatcross the electrically conductive traces. Each ribbon comprises one ormore nanotubes. The ribbons are typically formed from selectivelyremoving material from a layer or matted fabric of nanotubes.

For example, as disclosed in U.S. Patent Publication No. 2003-0021966, ananofabric may be patterned into ribbons, and the ribbons can be used asa component to create non-volatile electromechanical memory cells. Theribbon is electromechanically-deflectable in response to electricalstimulus of control traces and/or the ribbon. The deflected, physicalstate of the ribbon may be made to represent a corresponding informationstate. The deflected, physical state has non-volatile properties,meaning the ribbon retains its physical (and therefore informational)state even if power to the memory cell is removed. As explained in U.S.Patent Publication No. 2003-0124325, three-trace architectures may beused for electromechanical memory cells, in which the two of the tracesare electrodes to control the deflection of the ribbon.

The use of an electromechanical bi-stable device for digital informationstorage has also been suggested (c.f. U.S. Pat. No. 4,979,149:Non-volatile memory device including a micro-mechanical storageelement).

The creation and operation of bi-stable, nano-electro-mechanicalswitches based on carbon nanotubes (including mono-layers constructedthereof) and metal electrodes has been detailed in previous patentapplications of Nantero, Inc. (U.S. Pat. Nos. 6,574,130, 6,643,165,6,706,402, 6,784,028, 6,835,591, 6,911,682, 6,919,592, 6,924,538,6,990,009 and 7,115,960; and U.S. patent application Ser. Nos.10/341,005, 10/341,055, 10/341,054, 10/341,130 and 10/776,059), thecontents of which are hereby incorporated by reference in theirentireties.

SUMMARY OF THE INVENTION

The invention provides data storage circuits and components of suchcircuits constructed using nanotube switching elements. The storagecircuits may be stand-alone devices or cells incorporated into otherdevices or circuits. The data storage circuits include or can be used inlatches, master-slave flip-flops, digital logic circuits, memory devicesand other circuits.

In one aspect of the invention, a master-slave flip-flop is constructedusing one or more nanotube switching element-based storage devices. Oneembodiment of a master-slave flip-flop circuit includes a differentialdata input, a first clock input and a second clock input for providingnon-overlapping first and second clock signals and a first input buffercoupled to the differential data input and the first clock input forgating the differential data input under the control of the first clockinput. The master storage element is coupled to the input buffer forstoring a first data value representative of the differential datainput. The master storage element is constructed of at least onenanotube switching element. A second input buffer is coupled to themaster storage element and the second clock input for gating theintermediate differential data value under the control of the secondclock input. The slave storage element is coupled to the second inputbuffer for storing a second data value representative of the first datavalue. The slave storage element is constructed of at least one nanotubeswitching element. A differential data output is coupled to the slavestorage element. In preferred embodiments, all of the components of amaster-slave latch are constructed using nanotube switching elements(and appropriate interconnections, and connections to Vdd and GND),without the use of MOS or similar field effect devices. In otherembodiments, a master-slave latch may use a combination of nanotubeswitching elements and other switching elements, including MOS fieldeffect devices.

In one aspect of the invention, the master storage element and the slavestorage element are non-volatile.

In another aspect of the invention, the master storage element and theslave storage element are constructed using non-volatile four-terminalnanotube switching elements.

In another aspect of the invention, the master storage element and theslave storage element are volatile.

In another aspect of the invention, the master storage element and theslave storage element are constructed using volatile three-terminalnanotube switching elements.

In another aspect of the invention, at least one of the master storageelement or the slave storage element is constructed using two nanotubeswitching element-based inverters.

In another aspect of the invention, the first nanotube switchingelement-based inverter and the second nanotube switching element-basedinverter are cross-coupled.

In another aspect of the invention, either the first input buffer or thesecond input buffer or both are provided by a nanotube switchingelement-based tri-stating inverter.

In another aspect of the invention, either the first input buffer or thesecond input buffer or both are provided by a single nanotube switchingelement.

In another aspect of the invention, an output driver circuit is coupledbetween the slave storage element and the differential output. Inpreferred embodiments, the output driver circuit is constructed usingnanotube switching elements.

In another aspect of the invention, a data storage cell is constructedusing nanotube switching elements. One embodiment of a data storage cellof the invention includes a first input for receiving a first inputsignal and a second input for receiving a second input signalcomplementary to the first input signal; a first inverter constructedusing nanotube switching elements, the first inverter having a firstcontrol input and a first output; and a second inverter constructedusing nanotube switching elements, the second inverter having a secondcontrol input and a second output. The first control input is coupled tothe first input and the second control input is coupled to the secondinput. The first inverter stores a first data value and the secondinverter stores a second data value provided via the first input and thesecond input respectively.

In one aspect of the invention, the first data value and the second datavalue correspond to a differential data value of a differential datasignal coupled to the first input and the second input. The values arecomplementary and the circuit effectively stores a single data bit.

In another aspect of the invention, the first data value and the seconddata value are independent and the circuit effectively stores two databits.

In another aspect of the invention, the first inverter and the secondinverter are volatile.

In another aspect of the invention, the first inverter and the secondinverter are cross-coupled.

In another aspect of the invention, the nanotube switching elements arethree-terminal devices.

In another aspect of the invention, the first inverter and the secondinverter are non-volatile.

In another aspect of the invention, the nanotube switching elements arefour-terminal devices.

In another aspect of the invention, the first inverter includes a firstrelease input and the second inverter includes a second release input,the first release input is coupled to the second input and the secondrelease input is coupled to the first input.

In another aspect of the invention, a storage device includes a storageelement constructed using at least one nanotube switching element havinga control electrode and a release electrode, and an equilibration deviceresponsive to a control signal that, when activated, maintains thecontrol electrode and the release electrode at the same potential. Theequilibration device may include a nanotube switching element or an MOSdevice.

The foregoing and other objects, features and advantages of theinvention will be apparent from the following more particulardescription of preferred embodiments of the invention, as illustrated inthe accompanying drawings in which like reference characters refer tothe same parts throughout the different views. The drawings are notnecessarily to scale, emphasis instead being placed upon illustratingthe principles of the invention.

BRIEF DESCRIPTION OF THE DRAWINGS

In the drawings:

FIG. 1 is a schematic illustration of a prior art circuit including amaster-slave storage device;

FIG. 2 is a schematic illustration of a prior art master-slave storagedevice;

FIGS. 3A-D are illustrations of an exemplary nanotube switching elementused in certain embodiments of the invention;

FIGS. 4A-C are schematic representations of a nanotube switching elementin various states of operation according to an embodiment of theinvention;

FIGS. 5A-B are a schematic illustration of an exemplary latchconstructed from nanotube switching elements according to an embodimentof the invention;

FIG. 6 is a schematic illustration of an exemplary master latchconstructed from nanotube switching elements according to an embodimentof the invention;

FIG. 7 is a schematic illustration of an exemplary master latchconstructed from nanotube switching elements according to an embodimentof the invention;

FIG. 8 is a schematic illustration of an exemplary input bufferconstructed from nanotube switching elements according to an embodimentof the invention;

FIGS. 9A-B are a schematic illustration of an exemplary latchconstructed from nanotube switching elements according to an embodimentof the invention;

FIGS. 10A-B are schematic illustrations of an exemplary volatile storageelement constructed from nanotube switching elements according to anembodiment of the invention;

FIGS. 11A-C are schematic illustrations of an exemplary storage deviceaccording to an embodiment of the invention;

FIGS. 12A-C are schematic illustrations of an exemplary storage deviceaccording to an embodiment of the invention; and

FIGS. 13A-C are schematic illustrations of an exemplary storage deviceaccording to an embodiment of the invention.

DETAILED DESCRIPTION

Embodiments of the present invention provide storage elementsconstructed using nanotube switching elements, and storage devices,including latches and master-slave latches, constructed therefrom. Theelements and devices may be used as stand-alone components or cellsintegrated into other devices or used in any type of logic circuit orother circuit. In preferred embodiments, the master-slave latches have amaster latch including an input buffer and a master storage cell, and aslave latch including an input buffer, a slave storage cell and anoutput driver. In preferred embodiments, the storage elements arenon-volatile. In preferred embodiments, an equilibration devicemaintains the storage element inputs at the same potential when thestorage device is in an off or store state, in order to protect thestored data from fluctuations. The storage elements and devices arepreferably MOS, and particularly MOS, compatible, but may also be usedin nanotube-switch only circuits. The storage elements and devices mayalso be fabricated in an integrated manner with MOS devices. The storageelements of preferred embodiments offer certain advantages overconventional MOS storage elements. The nanotube switching element-basedstorage elements dissipate power only when switching. They may alsooperate in harsh environments, such as at high temperature or highlevels of radiation, in which MOS components may fail. The nanotubeswitching element-based storage elements also allow greater density ofcomponents in fabricated integrated circuits because nanotube layers maybe constructed over conventional MOS layers.

FIG. 1 illustrates a prior art digital logic circuit 10 including aninput master-slave latch 20, combinational logic 30, and an outputmaster-slave latch 40. The input master-slave latch 20 and the outputmaster-slave latch 40 have the same architecture and operate in the sameway. Each latch 20, 40 is a master-slave latch with a two-phasenon-overlapping clock. Latch 20 has a input Din, a master latch 22,clocked by CLK1, a slave latch 24 clocked by CLK2, and an output Dout.CLK1 and CLK2 are non-overlapping. It will be appreciated that areference to a clock signal herein also embraces its complement whereappropriate; for example, where use of the complementary clock signal isnecessary to provide a signal of the proper polarity to a switchingelement. The master latch 22 receives and temporarily stores data from alogic and/or memory circuit and provides it to the slave latch 24. Theslave latch 24 receives the data from the master latch 22 and providesit to the next logic stage or other circuit component, a cache memory,for example. Master latch 22 is transparent to the input Din while CLK1is low, captures the state of the input Din on the rising edge of CLK1,and continues to hold and provide as output the stored input Din whileCLK1 is low. Slave latch 24 is transparent to the output of master latch22 while CLK2 is low, captures the signal from master latch 22 on therising edge of CLK2, and continues to hold and provide the signal asoutput Dout while CLK2 is low. Latch 40 also includes a master latch 42and a slave latch 44. The master-slave latch architecture allows theoutput Dout to be isolated from changes in the input Din and limitschanges in Dout to predictable clock transitions. Latches 20 and 40 arevolatile, i.e., the stored data is lost if the power to the cell isinterrupted. Circuit 10 is a sequential circuit, in which the presentoutput depends on current inputs and previous states of the circuit.

FIG. 2 illustrates a prior art CMOS implementation of a master-slavelatch 50. Latch 200 operates as described above with respect to latches20 and 40. Latch 50 includes a master latch 60 and a slave latch 70. Themaster latch 60 includes a storage cell formed of two inverters 61 and62 connected in a feedback loop. Master latch 60 also includes atransfer device pair 63 for gating Din under the control of clock signalCLK1. Slave latch 70 also includes a storage cell formed of twoinverters 71 and 72 connected in a feedback loop. Slave latch 70includes a transfer device pair 73 for gating Dins under the control ofclock signal CLK1. Slave latch also incorporates an output driver 80including two inverters connected in sequence to drive output Dout.

FIGS. 5-13 illustrate various storage elements constructed usingnanotube switching elements, and related circuitry, according to certainaspects of the invention. FIGS. 3A-D depict an exemplary nanotubeswitching element 300 in cross-section and layout views and in twoinformational states for use in certain embodiments of the invention. Amore detailed description of these switches and other architectures fornanotube switching elements may be found in the related cases identifiedand incorporated above. Non-volatile four-terminal nanotube switchingelements are described in U.S. patent application Ser. No. 10/918,085,which is incorporated by reference above. A brief description followshere for convenience.

FIG. 3A is a cross sectional view of a preferred nanotube switchingelement 100. Nanotube switching element includes a lower portion havingan insulating layer 117, control electrode 111, and output electrodes113 c,d. Nanotube switching element further includes an upper portionhaving release electrode 112, output electrodes 113 a,b, and signalelectrodes 114 a,b. A nanotube channel element 115 is positioned betweenand held by the upper and lower portions.

Release electrode 112 is made of conductive material and is separatedfrom nanotube channel element 115 by an insulating material 119. Thechannel element 115 is separated from the facing surface of insulator119 by a gap height G102.

Output electrodes 113 a,b are made of conductive material and areseparated from nanotube channel element 115 by insulating material 119.

Output electrodes 113 c,d are likewise made of conductive material andare separated from nanotube channel element 115 by a gap height G103.Notice that the output electrodes 113 c,d are not covered by insulator.

Control electrode 111 is made of conductive material and is separatedfrom nanotube channel element 115 by an insulating layer (or film) 118.The channel element 115 is separated from the facing surface ofinsulator 118 by a gap height G104.

Signal electrodes 114 a,b each contact the nanotube channel element 115and can therefore supply whatever signal is on the signal electrode tothe channel element 115. This signal may be a fixed reference signal(e.g., V_(DD) or Ground) or varying (e.g., a Boolean discrete valuesignal that can change). Only one of the electrodes 114 a,b need beconnected, but both may be used to reduce effective resistance.

Nanotube channel element 115 is a lithographically-defined article madefrom a porous fabric of nanotubes (more below). It is electricallyconnected to signal electrodes 114 a,b. The electrodes 114 a,b andsupport 116 pinch or hold the channel element 115 at either end, and itis suspended in the middle in spaced relation to the output electrodes113 a-d and the control electrode 111 and release electrode 112. Thespaced relationship is defined by the gap heights G102-G104 identifiedabove. For certain embodiments, the length of the suspended portion ofchannel element 115 is about 300 to 350 nm.

Under certain embodiments the gaps G103, G104, G102 are in the range of5-50 nm. The dielectric on terminals 112, 111, and 113 a and 113 b arein the range of 5-30 nm, for example. The carbon nanotube fabric densityis approximately 10 nanotubes per 0.2×0.2 um area, for example. Thesuspended length of the nanotube channel element is in the range of 300to 350 nm, for example. The suspended length to gap ratio is about 5 to15 to 1 for non-volatile devices, and less than 5 for volatileoperation, for example.

FIG. 3B is a plan view or layout of nanotube switching element 100. Asshown in this figure, electrodes 113 b,d are electrically connected asdepicted by the notation ‘X’ and item 102. Likewise electrodes 113 a,care connected as depicted by the ‘X’. In preferred embodiments theelectrodes are further connected by connection 120. All of the outputelectrodes collectively form an output node 113 of the switching element100.

Under preferred embodiments, the nanotube switching element 100 of FIGS.3A and 3B operates as shown in FIGS. 3C and D. Specifically, nanotubeswitching element 100 is in an OPEN (OFF) state when nanotube channelelement is in position 122 of FIG. 3C. In such state, the channelelement 115 is drawn into mechanical contact with dielectric layer 119via electrostatic forces created by the potential difference betweenelectrode 112 and channel element 115. Output electrodes 113 a,b are inmechanical contact (but not electrical contact) with channel element115. Nanotube switching element 100 is in a CLOSED (ON) state whenchannel element 115 is elongated to position 124 as illustrated in FIG.3D. In such state, the channel element 115 is drawn into mechanicalcontact with dielectric layer 118 via electrostatic forces created bythe potential difference between electrode 111 and channel element 115.Output electrodes 113 c,d are in mechanical contact and electricalcontact with channel element 115 at regions 126. Consequently, whenchannel element 115 is in position 124, signal electrodes 114 a and 114b are electrically connected with output terminals 113 c,d via channelelement 115, and the signal on electrodes 114 a,b may be transferred viathe channel (including channel element 115) to the output electrodes 113c,d.

By properly tailoring the geometry of nanotube switching element 100,the nanotube switching element 100 may be made to behave as anon-volatile or a volatile switching element. By way of example, thedevice state of FIG. 3D may be made to be non-volatile by properselection of the length of the channel element relative to the gap G104.(The length and gap are two parameters in the restoring force of theelongated, deflected channel element 115.) Length to gap ratios ofgreater than 5 and less than 15 are preferred for non-volatile device;length to gap ratios of less than 5 are preferred for volatile devices.

The nanotube switching element 100 operates in the following way. Ifsignal electrode 114 and control electrode 111 (or 112) have a potentialdifference that is sufficiently large (via respective signals on theelectrodes), the relationship of signals will create an electrostaticforce that is sufficiently large to cause the suspended, nanotubechannel element 115 to deflect into mechanical contact with dielectric118 on electrode 111 (or dielectric 119 on electrode 112). (This aspectof operation is described more fully in the incorporated patentreferences.) This deflection is depicted in FIGS. 3D (and 3C). Theattractive force elongates (stretches) and deflects the nanotube fabricof channel element 115 until it contacts the insulated region 118 of theelectrode 111. The nanotube channel element is thereby strained, andthere is a restoring tensil force, dependent on the geometricalrelationship of the circuit, among other things.

By using appropriate geometries of components, the switching element 100then attains the closed, conductive state of FIG. 3D in which thenanotube channel 115 mechanically contacts the control electrode 111 andalso output electrode 113 c,d. Since the control electrode 111 iscovered with insulator 118 any signal on electrode 114 is transferredfrom the electrode 114 to the output electrode 113 via the nanotubechannel element 115. The signal on electrode 114 may be a varyingsignal, a fixed signal, a reference signal, a power supply line, orground line. The channel formation is controlled via the signal appliedto the electrode 111 (or 112). Specifically the signal applied tocontrol electrode 111 needs to be sufficiently different in relation tothe signal on electrode 114 to create the electrostatic force to deflectthe nanotube channel element to cause the channel element 115 to deflectand to form the channel between electrode 114 and output electrode 113,such that switching element 100 is in the CLOSED (ON) state.

In contrast, if the relationship of signals on the electrode 114 andcontrol electrode 111 is insufficiently different, then the nanotubechannel element 115 is not deflected and no conductive channel is formedto the output electrode 113. Instead, the channel element 115 isattracted to and physically contacts the insulation layer on releaseelectrode 112. This OPEN (OFF) state is shown in FIG. 3C. The nanotubechannel element 115 has the signal from electrode 114 but this signal isnot transferred to the output node 113. Instead, the state of the outputnode 113 depends on whatever circuitry it is connected to and the stateof such circuitry. The state of output node 113 in this regard isindependent of channel element voltage from signal electrode 114 andnanotube channel element 115 when the switching element 100 is in theOPEN (OFF) state.

If the voltage difference between the control electrode 111 (or 112) andthe channel element 115 is removed, the channel element 115 returns tothe non-elongated state (see FIG. 3A) if the switching element 100 isdesigned to operate in the volatile mode, and the electrical connectionor path between the electrode 115 to the output node 113 is opened.

Preferably, if the switching element 100 is designed to operate in thenon-volatile mode, the channel element is not operated in a manner toattain the state of FIG. 3A. Instead, the electrodes 111 and 112 areexpected to be operated so that the channel element 115 will either bein the state of FIG. 3C or 3D.

The output node 113 is constructed to include an isolation structure inwhich the operation of the channel element 115 and thereby the formationof the channel is invariant to the state of the output node 113. Sincein the preferred embodiment the channel element is electromechanicallydeflectable in response to electrostatically attractive forces, afloating output node 113 in principle could have any potential.Consequently, the potential on an output node may be sufficientlydifferent in relation to the state of the channel element 115 that itwould cause deflection of the channel element 115 and disturb theoperation of the switching element 100 and its channel formation; thatis, the channel formation would depend on the state of an unknownfloating node. In the preferred embodiment this problem is addressedwith an output node that includes an isolation structure to prevent suchdisturbances from being caused.

Specifically, the nanotube channel element 115 is disposed between twooppositely disposed electrodes 113 b,d (and also 113 a,c) of equalpotential. Consequently, there are opposing electrostatic forces thatresult from the voltage on the output node. Because of the opposingelectrostatic forces, the state of output node 113 cannot cause thenanotube channel element 115 to deflect regardless of the voltages onoutput node 113 and nanotube channel element 115. Thus, the operationand formation of the channel is made invariant to the state of theoutput node.

Under certain embodiments of the invention, the nanotube switchingelement 100 of FIG. 3A may be used as pull-up and pull-down devices toform power-efficient circuits. Unlike MOS and other forms of circuits,the pull-up and pull down devices may be identical devices and need nothave different sizes or materials. To facilitate the description of suchcircuits and to avoid the complexity of the layout and physical diagramsof FIGS. 3A-D, a schematic representation has been developed to depictthe switching elements.

In summary, a four-terminal nanotube switching element includes ananotube channel element that provides a controllably formableconductive channel from an input terminal to an output terminal. Acontrol input provided via a control terminal controls the formation ofthe conductive channel. A release input, which is complementary to thecontrol input in preferred embodiments, provided via a release terminalresets the nanotube channel element from an ON state to an OFF state. Insome applications, during a portion of the operating cycle, it may bedesirable to set control input and release input to the same voltage. Ifcontrol input and release input are at the same voltage, the devicemaintains its state, independent of the input and release voltage valuesand the output voltage values.

FIG. 4A is a schematic representation of a nanotube switching element100 of FIG. 3A. The nodes use the same reference numerals. This type ofschematic representation is used to indicate a nanotube switchingelement throughout the present application for convenient reference.

FIGS. 4B-C depict a nanotube channel element 100 when its signalelectrode is tied to VDD, and its states of operation. For example, FIG.4B is a schematic representation of the nanotube switching element inthe OPEN (OFF) state illustrated in FIG. 3C, in which signal node 114and the nanotube channel element 115 are at ground, the controlelectrode 111 is at ground, and the release electrode 112 is at V_(DD).The nanotube channel element is not in electrical contact with outputnode 113. FIG. 4C is a schematic representation of the nanotubeswitching element in the CLOSED (ON) state illustrated in FIG. 3D. Inthis case, signal node 114 and the nanotube channel element 115 are atground, the control electrode 111 is at V_(DD), and the releaseelectrode 112 is at ground. The nanotube channel element is deflectedinto mechanical and electrical contact with the output node 113.Moreover, if as described above, geometries are selected appropriately,the contact will be non-volatile as a result of the Van der Waals forcesbetween the channel element and the uninsulated, output electrode. Thestate of electrical contact is depicted by the short black line 204representing the nanotube channel element contacting the output terminal113. This results in the output node 113 assuming the same signal (i.e.,ground or 0 V) as the nanotube channel element 115 and signal node 114.

FIGS. 5A and 5B illustrate one embodiment of a master-slave latchconstructed in accordance with aspects of the present invention. Thelatch of FIGS. 5A and 5B is constructed entirely of nanotube-basedswitching elements and does not include any conventional CMOStransistors. The latch of FIGS. 5A and 5B is a dual-rail differentialinput and dual-rail differential output device. FIG. 5A illustrates themaster latch 500 and FIG. 5B illustrates the slave latch 550 of themaster-slave latch. Master latch 500 has two complementary inputs, Dinand Din_(C). (The subscript “C” is used to denote a complementarysignal.) Master latch 500 also has two complementary outputs R1 and R1_(C). X and Y are used to indicate interconnection points between theschematic of FIG. 5A and the schematic of FIG. 5B. Master latch 500includes a storage element 510 and a tri-state input buffer provided bya first tri-state inverter 520 and a second tri-state inverter 530.

The tri-state input buffer forms a dual-rail differential input stagefor the master-slave latch clocked by CLK1. Master latch 500 has 2 inputterminals 501 and 502. Tri-state inverters 520 and 530 providecomplementary inputs Din and Din_(C) to the master latch 500 under thecontrol of clock signal CLK1. Tri-state inverters 520 and 530 have thesame architecture. Tri-state inverter 520 is a nanotube switchingelement-based dual rail differential input, single rail output, tristateinverter. Tri-state inverter 520 is formed of four-terminal nanotubeswitching elements, of the type illustrated in FIGS. 3A-3D.

Tri-state inverter 520 includes an inverter 521 and tri-statingswitching elements 522 and 523. Inverter 521 includes a pull-upswitching element, which provides a path from V_(DD) to the output underthe control of an input signal when tri-state element 522 is activated,and a pull-down switching element, which provides a path from GND to theoutput under the control of an input signal when tri-state element 523is activated. The control electrodes of the pull-up and pull-downswitching elements are tied to a single input terminal and are connectedto Din. The release electrodes of the pull-up and pull-down switchingelements are tied to a single input terminal and are connected toDin_(C). Inverter 521 functions to invert Din; the operation of inverter521 is tri-stated under the control of CLK1. Tri-stating switchingelements 522 and 523 are four-terminal nanotube switching elements.Tri-stating switching element 522 is disposed between VDD and the signalelectrode of the pull-up switching element of inverter 521, where thesignal electrode corresponds to signal electrode 114 of nanotubeswitching element 300 illustrated in FIGS. 3A-3D. The signal electrodeof tri-state switching element 522 is connected to VDD and the outputelectrode is connected to the signal electrode of the pull-up switchingelement of inverter 521. The control electrode of tri-stating switchingelement 522 is connected to CLK1, while the release electrode isconnected to the complement, CLK1 _(C). Tri-stating switching element523 is disposed between GND and the signal electrode of the pull-downswitching element of inverter 521. The input electrode of tri-stateswitching element 523 is connected to GND and the output electrode isconnected to the signal electrode of the pull-down switching element ofinverter 521. The control electrode of tri-stating switching element 523is connected to CLK1 _(C), while the release electrode is connected toCLK1. CLK1 and CLK1 _(C) enable and disable the tri-stating inverters520 and 530. When CLK1 is high, the output of inverter 520 is tri-statedbecause tri-stating switches 522 and 523 are OFF. Accordingly, tri-stateswitching elements 522 and 523 are activated only when CLK1 is low. WhenCLK1 is low, inverter 520 inverts the input Din to produce the outputDin′, which is equivalent to Din_(C).

Tri-state inverter 530 operates in a similar way to tri-state inverter520. Tri-state switching elements 532 and 533 are equivalent totri-stating switching element 522 and 523, respectively. Also, inverter531 is equivalent to inverter 521. The input to inverter 530 however isDin_(C) and the inverted output is Din_(C)′, which is equivalent to Din.

Storage element 510 is formed of cross-coupled nanotube switchingelement-based inverters 512 and 514. Inverter 514 and inverter 512 havethe same architecture. Both use non-volatile four-terminal nanotubeswitching elements as a basic building block. Inverters 512 and 514 aresimilar to inverter 521. Inverter 512 has an input, a release input (thecomplement of the input) and an output. Inverter 512 is formed of apull-up circuit including a non-volatile four-terminal nanotubeswitching element connected to VDD and a pull-down circuit including anon-volatile four-terminal nanotube switching element connected toground. The control electrodes of the pull-up nanotube switching and thepull-down element are tied to the inverter input. Similarly, the releaseelectrodes of the pull-down nanotube switching element and the pull-upnanotube switching element are tied to the release input. The input ofinverter 512 is connected to Din_(C)′ (equivalent to Din) and therelease input of inverter 512 is connected to Din′. The input ofinverter 514 is connected to Din′ and the release input of inverter 514is connected to Din_(C)′. The inverters 512 and 514 are cross-coupledsuch that the output of each inverter is also connected to the input ofthe other inverter. As discussed further below, because inverters 512and 514 are non-volatile devices, storage element 510 is a non-volatilestorage element.

In operation, when CLK1 is low, storage element 510 has active inputsand stores the output of tri-stating inverter 520 and complementarytri-stating inverter 530. If Din is 1, then Din′ is 0 and “1” is storedin inverter 512; if Din is 0, then Din′ is 1 and “0” is stored ininverter 512. Inverter 514 stores the complementary logic level. WhenCLK1 goes high, the input signals to storage element 510 are effectivelydisconnected by the tri-stating inverters 520 and 530. Thus, storageelement 510 stores the values present on its inputs at the rising edgeof CLK1. These stored values will not change while CLK1 is high or ifpower to the circuit is interrupted. Since inverters 512 and 514 arenon-volatile, the values present on the rising edge of CLK1 can bestored indefinitely.

Storage element 510 provides outputs R1 (which corresponds to Din′,equivalent to Din_(C)) and R1 _(C) (which corresponds to Din_(C)′,equivalent to Din) to slave latch 550.

The architecture of slave latch 550 is similar to that of master latch500. Slave latch 550 includes an input buffer comprising a firsttri-stating inverter 570 and a second tri-stating inverter 580controlled by CLK2. Slave latch 550 also includes a storage element 560.Tri-stating inverter 570 includes an inverter 571 and a pull-uptri-stating switching element 572 and a pull-down tri-stating switchingelement 573. Tri-stating inverter 580 includes an inverter 581 and apull-up tri-stating switching element 582 and a pull-down tri-statingswitching element 583. The tri-stating switching elements 572 and 573,582 and 583 are connected to CLK2 and CLK2′. The tri-stating inverters570 and 580 are activated when CLK2 is low. Thus, tri-stating inverters570 and 580 provide signals R1′ and R1 _(C)′ to storage element 560 whenCLK2 is low and are tri-stated when CLK2 is high. Storage element 560also comprises cross-coupled nanotube-based inverters 562 and 564.Storage element 560 stores R1′ and R1 _(C)′ on the rising edge of CLK2.Slave latch 550 also includes output drivers 590 formed from dual-raildifferential input and dual-rail differential output inverters. Inpreferred embodiments, output drivers 590 are also implemented usingnanotube-based devices (indicated by the notations on the corners of theconventional inverter symbol). The output drivers 590 are preferablycapable of driving CMOS-based devices, nanotube-based devices, or both.The outputs Dout and Dout_(C) become valid on propagation delay afterCLK2 goes low.

CLK1 and CLK2 are preferably implemented as non-overlapping clocksignals. Thus, the device composed of master latch 500 and slave latch550 is a master-slave latch with a two-phase non-overlapping clock,formed of nanotube switching elements.

Various embodiments of the invention like the nanotube-basedmaster-slave latch illustrated in FIGS. 5A and 5B offers certainadvantages over conventional CMOS devices. The master-slave latch ispreferably CMOS compatible, but may also be used in nanotube-switch onlycircuits. The master-slave latch may also be fabricated in an integratedmanner with CMOS devices. The nanotube switching element-based storageelements dissipate power only when switching. They may also operate inharsh environments, such as at high temperature or high levels ofradiation, in which CMOS components may fail. The nanotube switchingelement based storage elements also allow greater density of componentsin fabricated integrated circuits because nanotube layers may beconstructed over conventional CMOS layers. Greater density permitsfabrication of smaller integrated circuits or more logic on a chip of agiven size.

The latch architecture of storage elements 510 and 560 may also be usedseparately as a basic storage element or as a building block for otherdevices. This storage element offers the advantages of nanotube-baseddevices.

FIG. 6 is a schematic representation of a gated latch 600 that providesan alternate embodiment for master latch 500. In gated latch 600, avolatile three-terminal single-rail input nanotube-based transfer device620, 630 is used in place of each tri-state inverter 520, 530 in masterlatch 500. In the illustrated embodiment, each volatile three-terminalsingle-rail input device 620 and 630 is constructed from a four-terminalnanotube switching element wherein the release electrode is connected tothe signal electrode. Each volatile three-terminal single-rail inputnanotube-based transfer device 620 and 630 has an input, Din andDin_(C), respectively, and an output to storage element 510. Thetransfer of the input from the signal electrode of each transfer deviceto the output electrode is controlled by CLK1. When CLK1 is high,transfer device 620 transfers the signal Din. The conductive channel iscreated by the deflection of the nanotube channel element when there isa sufficient potential difference (regardless of polarity) between thenanotube channel element and a control electrode. Since the potential ofthe signal Din is variable between a digital 0 and a digital 1, and maybe in the range of, e.g., 0V to V_(DD), if the control signal providedto transfer device 620 also has the same operating range, i.e., 0 V toV_(DD), the transfer device will not switch ON and OFF as desired. Insome cases, the potential difference may not exceed the thresholdamount, e.g., when the input signal is a digital 1, to form the channeland transfer the signal. In other cases, the potential difference mayexceed the threshold amount, forming the channel, when channel formationis not desired, e.g., when the input signal is a digital 1 and the clocksignal is a digital 0. Accordingly, CLK1 is shifted to an operatingrange wherein proper switching operation can be expected, e.g., thetransfer device is OFF (not conducting) when CLK1 is low and is ON(conducting) when CLK1 is high. CLK1 may be overdriven to a potentialgreater than an upper supply voltage. The desired operating range ofCLK1 depends on the architecture and dimensions of the nanotube transferdevice. Conventional signal step-up circuitry can be used to shift CLK1to the desired operating range. U.S. patent application Ser. No.11/033,087, filed on Jan. 10, 2005, entitled Nanotube-Based TransferDevices and Related Circuits, having the same assignee as the presentapplication, describes certain circuits incorporating this signalshifting technique and is incorporated herein by reference. Thisembodiment 600 is advantageous in that a smaller number of componentsare used to implement the gating function than in master latch 500.Volatile three-terminal single-rail input nanotube-based transferdevices may also be used to replace tri-state inverters 570 and 580 inslave latch 550.

FIG. 7 is a schematic representation of a gated latch 700 that providesanother alternative embodiment for master latch 500. Gated latch 700uses a non-volatile four-terminal dual-rail input nanotube-basedtransfer device 720, 730 in place of each tri-state inverter 520, 530 inmaster latch 500. The operating range of CLK1 and CLK1 _(C) controlsignals provided to transfer devices 720 and 730 should also be shifted,as described above with respect to latch 600, in order to ensure properoperation of the transfer devices.

FIG. 8 is a schematic representation of a volatile single-rail tristateinverter 800 that can be used to replace each of non-volatile tristateinverters 520 and 530 in master latch 500. The four-terminalnon-volatile nanotube switching elements of tristate inverters 520 and530 are replaced with three-terminal volatile nanotube switchingelements in volatile single-rail tristate inverter 800. In theillustrated embodiment 800, each volatile three-terminal single-railinput device is constructed from a four-terminal nanotube switchingelement wherein the release electrode is connected to the signalelectrode.

FIGS. 9A and 9B illustrate a master-slave latch constructed inaccordance with another aspect of the invention. Master latch 900 andslave latch 950 incorporate latches 910 and 960 formed of non-volatilenanotube-based inverters that are not cross-coupled. Cross-coupling isnot necessary because the non-volatile elements are able to store a databit, unlike a volatile CMOS element.

FIGS. 10A and 10B illustrate the implementation and operation of avolatile latch 1000 that can be used in place of each of latches 510 and560. Volatile latch 1000 is composed of two inverters 1010 and 1020formed from four-terminal nanotube switching elements wherein therelease electrode is connected to the input electrode to form athree-terminal device. The nanotube switching elements are volatile. Theinverters 1010 and 1020 are also volatile. The inverters arecross-coupled. FIG. 10A illustrates storage of a 1 in the left inverter1000 (from a 0 value input signal), and its complement in the rightinverter 1020. FIG. 10B illustrates storage of a 0 in the left inverter1010 (from a positive value input signal) and its complement in theright inverter 1020.

FIGS. 11A-C illustrate a differential-input, differential-output storagedevice 1100 including a nanotube-based storage element 1110. Storageelement 1110 is composed of two nanotube switching element-basedinverters 1111 and 1112 that are not cross-coupled. The inverters 1111and 1112 are non-volatile. The control inputs of inverter 1111 areconnected to input signal A; the control inputs of inverter 1112 areconnected to input signal A_(C). The release inputs of inverter 1111 areconnected to input signal A_(C); the release inputs of inverter 1112 areconnected to input signal A. The control inputs of inverter 1111 areconnected to the release inputs of inverter 1112, and vice versa.Storage device 1100 also includes a differential input buffer providedby first transfer device 1120 and second transfer device 1130. The inputbuffer is controlled by CLK, which is connected to the control inputs ofboth transfer devices 1120 and 1130. The storage device also includes anequilibration element 1115 provided by a volatile nanotube switchingelement. The equilibration element 1115 is activated by CLK_(C). WhenCLK is high, input signals A and A_(C) are provided to the storageelement 1110; the two inverters 1111 and 1112 are responsive to andstore the input signals. When CLK is low, the input signals A and A_(C)are blocked by the input buffer by transfer devices 1120 and 1130, andstorage element 1110 stores the state provided on the falling edge ofCLK. If the input lines to the storage element 1110 are disturbed whileCLK is low, however, e.g., by noise, then one or both of the inverterstates of storage element 1110 could inadvertently be flipped.Equilibration device 1115, when activated, ties together the inputs(both control and release inputs) to inverters 1111 and 1112 in storageelement 1110. Since these inputs are all tied together, the control andrelease electrode of each nanotube switching element exert opposingforces at any given time, and any disturbances are cancelled out, thus,the stored state within each inverter 1111, 1112 is not affected. Thestorage device 1100 also has a differential output buffer 1190,connected to the output of storage element 1110. Storage device 1100 hasvarious applications, e.g., it can be used as a latch element in amaster-slave latch. FIG. 11B shows the operation of the storage device1100, when it is being written, i.e., when CLK is high. The circleshighlight that a nanotube switching element is activated, i.e., thechannel element is deflected. The use of nanotube-based transfer devicesin the input buffer requires that the CLK signal be shifted andoverdriven as discussed above. FIG. 11C shows the operation of thestorage device 1100, when it is in the “store” mode, when CLK is low.The equilibration device 1115 is activated. Because a nanotube-basedtransfer device is used to provide equilibration device 1165, it ispreferred that the device be overdriven by a shifted signalrepresentative of CLK. The stored states within inverters 1111 and 1112can be maintained until the next write cycle and are protected fromchange by the equilibration device 1114.

FIGS. 12A-C illustrate a single-input, single-output storage device 1200in accordance with an embodiment of the invention. Storage device 1200stores a single value representative of the state of input signal A.Storage device 1200 includes a storage element 1210 comprising a singleinverter constructed from non-volatile nanotube switching elements. Aninverter 1235 generates A_(C) in order to provide the differentialsignal needed to operate storage element 1210. As indicated in thefigure, inverter 1235 is a nanotube-based inverter, but could also beprovided by MOS or other technology. A differential input bufferprovided by transfer devices 1220 and 1230 gates the input signal A andits complement A_(C) to storage element 1210. A clock signal CLKcontrols the input buffer. Storage device 1200 also includes anequilibration device 1215. The equilibration device 1215 is activated byCLK_(C). The equilibration device 1215 maintains the control and releaseinputs of storage element 1210 at the same potential when device 1200 isin the store state. The internal state remains unchanged even if noisesignals are present because the control and release inputs applyopposing forces to the nanotube channel elements. This preventsfluctuations on the inputs from unexpectedly changing the stored datavalue. Storage device 1200 also includes an output buffer 1290 connectedto the output of the storage element 1210. FIGS. 12B and C illustratethe operation of the device 1200. When CLK is high, the device is in awrite state; when CLK is low, the device is in a store state and theequilibration device 1215 is activated.

FIGS. 13A-C illustrate a single input, single output storage device 1300in accordance with an embodiment of the invention. Device 1300 issimilar to device 1100, however certain components are provided by MOSelements. Accordingly, device 1300 is a hybrid nanotube and MOS device.In particular, the input buffer is formed of MOS pass transistors 1320and 1330. Similarly, equilibration element 1315 is an MOS transistor.The use of MOS elements eliminates the need for signal shiftingcircuitry. FIGS. 13B and C illustrate the operation of the device 1300.When the input buffer is activated, equilibration device 1315 is off.When the input buffer is deactivated, and the device 1300 is in thestore state, equilibration device 1315 is on. When it is activated,equilibration device 1315 maintains the control and release inputs ofthe storage element 1310 at the same potential, so that fluctuations onthe inputs are cancelled out and do not affect the stored state. Ahybrid implementation may be particularly useful when size is asignificant consideration. Nanotube-based and MOS elements can belayered on top of each other, which enables a reduction in the totalarea required for the device layout.

Preferred embodiments of the invention are compatible with MOS circuitsand can be manufactured in an integrated way with MOS circuits. It iscontemplated that certain embodiments of the invention can be usedinterchangeably with existing field effect device implementations, e.g.,CMOS implementations. (MOS designs can readily be converted to nanotubeswitch designs. Storage devices constructed according to the inventioncan be substituted for MOS cells in larger MOS circuits withoutimpacting other portions of the original design. New designs combiningnanotube switch technology with MOS technology can readily be created byusing embodiments of present invention with components selected from aMOS device library.

In view of the wide variety of embodiments to which the principles ofthe present invention can be applied, it should be understood that theillustrated embodiments are exemplary only, and should not be taken aslimiting the scope of the present invention. Preferred embodiments usethe nanotube-based switches of the incorporated related references. Asdescribed therein, many volatile and non-volatile configurations may beused. Combinations of different configurations may also be used. Theseswitches may then be arranged and sized based on the requirements of aparticular application, limitations of certain fabrication techniques,etc.

While single walled carbon nanotube channel elements are preferred,multi-walled carbon nanotubes may also be used. Also, nanotubes may beused in conjunction with nanowires. Nanowires as referenced hereinincludes single nanowires, aggregates of non-woven nanowires,nanoclusters, nanowires entangled with nanotubes comprising ananofabric, mattes of nanowires, etc. While carbon nanotube channelelements are preferred, it is contemplated that other nanotube channelelements may also be used in some embodiments.

The following patent references refer to various techniques for creatingnanotube fabric articles and switches and are assigned to the assigneeof this application. Each is hereby incorporated by reference in itsentirety:

-   -   Electromechanical Memory Having Cell Selection Circuitry        Constructed With Nanotube Technology (U.S. Pat. No. 6,643,165),        filed on Jul. 25, 2001;    -   Electromechanical Memory Array Using Nanotube Ribbons and Method        for Making Same (U.S. Pat. No. 6,919,592), filed on Jul. 25,        2001;    -   Hybrid Circuit Having Nanotube Electromechanical Memory (U.S.        Pat. No. 6,574,130), filed on Jul. 25, 2001;    -   Electromechanical Three-Trace Junction Devices (U.S. Pat. No.        6,911,682), filed on Dec. 28, 2001;    -   Methods of Making Electromechanical Three-Trace Junction Devices        (U.S. Pat. No. 6,784,028), filed on Dec. 28, 2001;    -   Nanotube Films and Articles (U.S. Pat. No. 6,706,402), filed        Apr. 23, 2002;    -   Methods of Nanotube Films and Articles (U.S. Pat. No.        6,835,591), filed Apr. 23, 2002;    -   Methods of Making Carbon Nanotube Films, Layers, Fabrics,        Ribbons, Elements and Articles (U.S. patent application Ser. No.        10/341,005), filed on Jan. 13, 2003;    -   Methods of Using Thin Metal Layers to Make Carbon Nanotube        Films, Layers, Fabrics, Ribbons, Elements and Articles (U.S.        patent application Ser. No. 10/341,055), filed Jan. 13, 2003;    -   Methods of Using Pre-formed Nanotubes to Make Carbon Nanotube        Films, Layers, Fabrics, Ribbons, Elements and Articles (U.S.        patent application Ser. No. 10/341,054), filed Jan. 13, 2003;    -   Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and        Articles (U.S. patent application Ser. No. 10/341,130), filed        Jan. 13, 2003;    -   Electro-Mechanical Switches and Memory Cells Using        Horizontally-Disposed Nanofabric Articles and Methods of Making        the Same, (U.S. Provisional Patent Application No. 60/446,783),        filed Feb. 12, 2003; now Devices Having Horizontally-Disposed        Nanofabric Articles and Methods of Making the Same (U.S. patent        application Ser. No. 10/776,059), filed Feb. 11, 2004;    -   Electromechanical Switches and Memory Cells using        Vertically-Disposed Nanofabric Articles and Methods of Making        the Same (U.S. Provisional Patent Application No. 60/446,786),        filed Feb. 12, 2003; now Devices Having Vertically-Disposed        Nanofabric Articles and Methods of Making the Same (U.S. Pat.        No. 6,924,538), filed Feb. 11, 2004.

Other aspects, modifications, and embodiments are within the scope ofthe following claims. The invention may be embodied in other specificforms without departing from the spirit or essential characteristicsthereof. The present embodiments are therefore to be considered inrespects as illustrative and not restrictive, the scope of the inventionbeing indicated by the appended claims rather than by the foregoingdescription, and all changes which come within the meaning and range ofthe equivalency of the claims are therefore intended to be embracedtherein.

1. A data storage circuit, comprising: a first input for receiving afirst input signal; a second input for receiving a second input signalcomplementary to the first input signal; a first inverter constructedusing nanotube switching elements, the first inverter having a firstcontrol input and a first output; and a second inverter constructedusing nanotube switching elements, the second inverter having a secondcontrol input and a second output; and wherein the first control inputis coupled to the first input and wherein the second control input iscoupled to the second input, wherein the first inverter stores a firstdata value and the second inverter stores a second data value.
 2. Thedata storage circuit of claim 1, wherein the first data value and thesecond data value correspond to a differential data value of adifferential data signal coupled to the first input and the secondinput.
 3. The data storage circuit of claim 1, wherein the first datavalue and the second data value are independent.
 4. The data storagecircuit of claim 1, wherein the first inverter and the second inverterare volatile.
 5. The data storage circuit of claim 4, wherein the firstinverter and the second inverter are cross-coupled.
 6. The data storagecircuit of claim 4, wherein the nanotube switching elements arethree-terminal devices.
 7. The data storage circuit of claim 1, whereinthe first inverter and the second inverter are non-volatile.
 8. The datastorage circuit of claim 7, wherein the nanotube switching elements arefour-terminal devices.
 9. The data storage circuit of claim 8, whereinthe first inverter includes a first release input and the secondinverter includes a second release input, the first release input iscoupled to the second input and the second release input is coupled tothe first input.